@inproceedings{kandoussi:hal-00776144,
TITLE = {Undoped and arsenic-doped low temperature (~165{\textdegree}C) microcrystalline silicon for electronic devices process},
AUTHOR = {Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Mohammed-Brahim, Tayeb and Moreac, Alain},
URL = {https://hal.science/hal-00776144},
BOOK
TITLE = {Int. Conf. Amorphous and Nanocrystalline Semiconductors (ICANS'21)},
ADDRESS = {Lisbonne, Portugal},
YEAR = {2005},
MONTH = Sep, HAL_ID = {hal-00776144},
HAL_VERSION = {v1},
}