@inproceedings{bendriaa:hal-00773096,
TITLE = {Study of mechanical maintain of polysilicon air-gap structures used in PH sensing},
AUTHOR = {Bendriaa, F. and Le Bihan, France and Sala{\"u}n, Anne-Claire and Mohammed-Brahim, Tayeb and Bonnaud, Olivier},
URL = {https://hal.science/hal-00773096},
BOOK
TITLE = {ICAN'2005},
ADDRESS = {Lisbonne, Portugal},
YEAR = {2005},
MONTH = Sep, HAL_ID = {hal-00773096},
HAL_VERSION = {v1},
}