@article{gautier:hal-00772793,
TITLE = {Fabrication of deep single trenches from N-type macroporous silicon},
AUTHOR = {Gautier, G. and Ventura, Laurent and Pordie, T. and Rogel, Regis and J{\'e}risian, R.},
URL = {https://hal.science/hal-00772793},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {487},
PAGES = {283-287},
YEAR = {2005},
MONTH = Sep, HAL_ID = {hal-00772793},
HAL_VERSION = {v1},
}