@inproceedings{legendre:hal-00751678,
TITLE = {Dielectric performance of innovant oxynitride thin films},
AUTHOR = {Le Gendre, Laurent and Le Paven-Thivet, Claire and Benzerga, Ratiba and Nguyen, Viet Hung and Delaveaud, Christophe and Sharaiha, Ala and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois},
URL = {https://hal.science/hal-00751678},
BOOK
TITLE = {s{\'e}minaire invit{\'e} devant la Business \& Technology Development Unit - MURATA Electronics - Yasu-shi, Japon},
ADDRESS = {Yasu, Japan},
YEAR = {2012},
MONTH = Nov, HAL_ID = {hal-00751678},
HAL_VERSION = {v1},
}