@inproceedings{legendre:hal-00751512,
TITLE = {Processing, crystallization behavior and dielectric performance of perovskite LaTiO_xN_y thin films},
AUTHOR = {Le Gendre, Laurent and Le Paven-Thivet, Claire and Lu, Yu and Benzerga, Ratiba and Nguyen, Viet Hung and Delaveaud, Christophe and Sharaiha, Ala and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois},
URL = {https://hal.science/hal-00751512},
BOOK
TITLE = {2nd Workshop NIMS - Universit{\'e} de Rennes 1 ''Materials and Sustainable development : Issues and Challenges of the 21st century''},
ADDRESS = {Tsukuba, Japan},
YEAR = {2012},
MONTH = Oct, HAL_ID = {hal-00751512},
HAL_VERSION = {v1},
}