@inproceedings{lu:hal-00710199,
TITLE = {Lanthanum titanium oxide and oxynitride thin films grown by water vapour and nitrogen reactive RF sputtering},
AUTHOR = {Lu, Yu and Le Paven-Thivet, Claire and Benzerga, Ratiba and Le Gendre, Laurent and Nguyen, Viet Hung and Sharaiha, Ala and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Delaveaud, Christophe},
URL = {https://hal.science/hal-00710199},
BOOK
TITLE = {7th International Symposium on NiTrides - ISNT 2012},
ADDRESS = {St-Malo, France},
YEAR = {2012},
MONTH = Jun, HAL_ID = {hal-00710199},
HAL_VERSION = {v1},
}