@inproceedings{lu:hal-00710095,
TITLE = {Homogeneity of oxynitride LaTiO_xN_y thin film deposition by RF magnetron sputtering},
AUTHOR = {Lu, Yu and Le Paven-Thivet, Claire and Le Gendre, Laurent and Benzerga, Ratiba and Nguyen, Viet Hung and Sharaiha, Ala and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Delaveaud, Christophe},
URL = {https://hal.science/hal-00710095},
BOOK
TITLE = {7th International Symposium on Nitrides - ISNT 2012},
ADDRESS = {St-Malo, France},
YEAR = {2012},
MONTH = Jun, HAL_ID = {hal-00710095},
HAL_VERSION = {v1},
}