@article{ziani:hal-00693204,
TITLE = {Dielectric oxynitride LaTiO_xN_y thin films deposited by reactive radio-frequency sputtering},
AUTHOR = {Ziani, Ahmed and Le Paven-Thivet, Claire and Fasquelle, Didier and Le Gendre, Laurent and Benzerga, Ratiba and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Carru, Jean-Claude and Sharaiha, Ala},
URL = {https://hal.science/hal-00693204},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {520},
NUMBER = {14},
PAGES = {4536-4540},
YEAR = {2012},
DOI = {10.1016/j.tsf.2011.10.192},
KEYWORDS = {permittivity ; epitaxy ; sputtering ; Perovskites ; nitrides ; thin films},
HAL_ID = {hal-00693204},
HAL_VERSION = {v1},
}