@article{ni:hal-00688271,
TITLE = {Fabrication and electrical characterization of silicon nanowires based resistors},
AUTHOR = {Ni, Liang and Demami, Fouad and Rogel, R{\'e}gis and Sala{\"u}n, Anne-Claire and Pichon, Laurent},
URL = {https://hal.science/hal-00688271},
JOURNAL = {Materials Science and Engineering},
PUBLISHER = {Elsevier},
VOLUME = {6},
NUMBER = {1},
PAGES = {ID 012013},
YEAR = {2009},
MONTH = Jun, DOI = {10.1088/1757-899X/6/1/012013},
PDF = {https://hal.science/hal-00688271/file/EMRS-regis_2009.pdf},
HAL_ID = {hal-00688271},
HAL_VERSION = {v1},
}