@article{legeay:hal-00682354,
TITLE = {A gradual annealing of amorphous sputtered ITO: crystalline structure and electrical characteristics},
AUTHOR = {Legeay, G{\'e}rard and Castel, Xavier},
URL = {https://hal.science/hal-00682354},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {520},
PAGES = {4021-4025},
YEAR = {2012},
DOI = {10.1016/j.tsf.2012.01.029},
HAL_ID = {hal-00682354},
HAL_VERSION = {v1},
}