@inproceedings{salaun:hal-00667842,
TITLE = {Polysilicon nanowires compatible with MOS technology for integrated bio-sensing applications},
AUTHOR = {Sala{\"u}n, Anne-Claire and Godem-Wenga, Gertrude and Jacques, Emmanuel and Rogel, R{\'e}gis and Pichon, Laurent},
URL = {https://hal.science/hal-00667842},
BOOK
TITLE = {Frontier 2011},
ADDRESS = {Japan},
PAGES = {25},
YEAR = {2011},
MONTH = Dec, HAL_ID = {hal-00667842},
HAL_VERSION = {v1},
}