@inproceedings{bouhadda:hal-00667829,
TITLE = {R{\'e}alisation de micro-canaux sur substrats de Silicium},
AUTHOR = {Bouhadda, Isma{\"i}l and Le Bihan, France and de Sagazan, Olivier},
URL = {https://hal.science/hal-00667829},
BOOK
TITLE = {JNRDM2011},
ADDRESS = {Cachan, France},
YEAR = {2011},
MONTH = May, HAL_ID = {hal-00667829},
HAL_VERSION = {v1},
}