@inproceedings{dasilvarodrigues:hal-00667803,
TITLE = {Humidity Sensor Thanks Array of Suspended Gate Field Effect Transistor},
AUTHOR = {da Silva Rodrigues, Bruno and de Sagazan, Olivier and Sala{\"u}n, Anne-Claire and Crand, Samuel and Le Bihan, France and Mohammed-Brahim, Tayeb and Bonnaud, Olivier and Morimoto, N.},
URL = {https://hal.science/hal-00667803},
BOOK
TITLE = {25th Symposium on Microelectronics Technology and Devices, SBMicro 2010},
ADDRESS = {Brazil},
YEAR = {2010},
MONTH = Sep, HAL_ID = {hal-00667803},
HAL_VERSION = {v1},
}