@article{dasilvarodrigues:hal-00667801,
TITLE = {Humidity Sensor Thanks Array of Suspended Gate Field Effect Transistor},
AUTHOR = {da Silva Rodrigues, Bruno and de Sagazan, Olivier and Sala{\"u}n, Anne-Claire and Crand, Samuel and Le Bihan, France and Bonnaud, Olivier and Mohammed-Brahim, Tayeb and Morimoto, N.},
URL = {https://hal.science/hal-00667801},
JOURNAL = {ECS Transactions},
PUBLISHER = {Electrochemical Society, Inc.},
VOLUME = {Vol. 31},
NUMBER = {Issue 1},
PAGES = {441-448},
YEAR = {2010},
HAL_ID = {hal-00667801},
HAL_VERSION = {v1},
}