@inproceedings{ziani:hal-00625021,
TITLE = {Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV},
AUTHOR = {Ziani, Ahmed and Delmotte, Franck and Le Paven-Thivet, Claire and Meltchakov, Evgueni and Bridou, Fran{\c c}oise and J{\'e}r{\^o}me, Arnaud and Roulliay, Marc and Gasc, Karine},
URL = {https://hal-iogs.archives-ouvertes.fr/hal-00625021},
NOTE = {poster},
BOOK
TITLE = {Advances in Optical Thin Films IV},
ADDRESS = {Marseille, France},
YEAR = {2011},
MONTH = Sep, HAL_ID = {hal-00625021},
HAL_VERSION = {v1},
}