@inproceedings{pluchon:hal-00623525,
TITLE = {Conception de micro-r{\'e}sonateurs 3D par proc{\'e}d{\'e}s hybrides},
AUTHOR = {Pluchon, David and Huby, Nolwenn and Vi{\'e},
V{\'e}ronique and Coulon, Nathalie . and Loas, Goulc'Hen and Panizza, Pascal and Gaviot, Etienne and B{\^e}che, Bruno and Zyss, Joseph},
URL = {https://hal.science/hal-00623525},
BOOK
TITLE = {Journ{\'e}es Nationales de l'Optique Guid{\'e}e},
ADDRESS = {Besan{\c c}on, France},
YEAR = {2010},
MONTH = Oct, HAL_ID = {hal-00623525},
HAL_VERSION = {v1},
}