@inproceedings{pichon:hal-00623471,
TITLE = {TP d'initiation {\`a} la lithographie AFM : application {\`a} la fabrication de r{\'e}sistance {\`a} partir de nano-ruban de silicium amorphe},
AUTHOR = {Pichon, Laurent and Rogel, R{\'e}gis and Lhermite, Herv{\'e},
URL = {https://hal.science/hal-00623471},
BOOK
TITLE = {11e Journ{\'e}es P{\'e}dagogiques Nationales du Comit{\'e} National de Formation en Micro-nano{\'e}lectronique},
ADDRESS = {Saint-Malo, France},
YEAR = {2010},
MONTH = Nov, HAL_ID = {hal-00623471},
HAL_VERSION = {v1},
}