@inproceedings{demami:hal-00623470,
TITLE = {Chemical sensors based on silicon nanowires},
AUTHOR = {Demami, Fouad and Ni, Liang and Rogel, R{\'e}gis and Sala{\"u}n, Anne-Claire and Pichon, Laurent},
URL = {https://hal.science/hal-00623470},
BOOK
TITLE = {2{\`e}mes Journ{\'e}es Nationales sur les technologies {\'e}mergentes en micro- et nanofabrication},
ADDRESS = {Palaiseau, France},
YEAR = {2010},
MONTH = Nov, HAL_ID = {hal-00623470},
HAL_VERSION = {v1},
}