@article{demami:hal-00617939,
TITLE = {Electrical properties of polysilicon nanowires for devices applications},
AUTHOR = {Demami, Fouad and Rogel, R{\'e}gis and Sala{\"u}n, Anne-Claire and Pichon, Laurent},
URL = {https://hal.science/hal-00617939},
NOTE = {4 pages},
JOURNAL = {physica status solidi (c)},
PUBLISHER = {Wiley},
VOLUME = {8},
NUMBER = {3},
PAGES = {827},
YEAR = {2011},
MONTH = Mar, DOI = {10.1002/pssc.201000227},
KEYWORDS = {polysilicon ; nanowires ; spacer ; in-situ doping ; resistor ; doping},
PDF = {https://hal.science/hal-00617939/file/physica_status_solid2010revised.pdf},
HAL_ID = {hal-00617939},
HAL_VERSION = {v1},
}