@inproceedings{lepaventhivet:hal-00606953,
TITLE = {Reactive sputtering deposition of perovkite LaTiO_xN_y films using a stoechimetric oxynitride LaTiO_xN_y target},
AUTHOR = {Le Paven-Thivet, Claire and Benzerga, Ratiba and Lu, Yu and Ziani, Ahmed and Le Gendre, Laurent and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala},
URL = {https://hal.science/hal-00606953},
BOOK
TITLE = {1ST WORKSHOP NIMS-UR1 ON ''MATERIALS AND SUSTAINABLE DEVELOPMENT: ISSUES AND CHALLENGES OF THE 21ST CENTURY''},
ADDRESS = {Rennes, France},
YEAR = {2011},
MONTH = May, HAL_ID = {hal-00606953},
HAL_VERSION = {v1},
}