@inproceedings{lu:hal-00606940,
TITLE = {Oxide and Oxynitride films in the La-Ti-O-N system : from deposition to dielectric characterization},
AUTHOR = {Lu, Yu and Le Paven-Thivet, Claire and Benzerga, Ratiba and Le Gendre, Laurent and Sharaiha, Ala and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois},
URL = {https://hal.science/hal-00606940},
BOOK
TITLE = {1ST WORKSHOP NIMS-UR1 ON ''MATERIALS AND SUSTAINABLE DEVELOPMENT: ISSUES AND CHALLENGES OF THE 21ST CENTURY''},
ADDRESS = {Rennes, France},
YEAR = {2011},
MONTH = May, HAL_ID = {hal-00606940},
HAL_VERSION = {v1},
}