@inproceedings{lu:hal-00606924,
TITLE = {Homogeneity of oxynitride thin films deposited by reactive RF magnetron sputtering},
AUTHOR = {Lu, Yu and Le Paven-Thivet, Claire and Benzerga, Ratiba and Le Gendre, Laurent and Sharaiha, Ala and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois},
URL = {https://hal.science/hal-00606924},
BOOK
TITLE = {European Materials Research Society - Spring Meeting 2011},
ADDRESS = {Nice, France},
YEAR = {2011},
MONTH = May, HAL_ID = {hal-00606924},
HAL_VERSION = {v1},
}