@inproceedings{nguyen:hal-00606922,
TITLE = {Dielectric oxynitride laTiOxNy thin films},
AUTHOR = {Nguyen, Viet Hung and Ziani, Ahmed and Benzerga, Ratiba and Le Paven-Thivet, Claire and Fasquelle, Didier and Lu, Yu and Le Gendre, Laurent and Castel, Xavier and Delaveaud, Christophe and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala and Carru, Jean-Claude},
URL = {https://hal.science/hal-00606922},
BOOK
TITLE = {European Materials Research Society - Spring Meeting 2011},
ADDRESS = {Nice, France},
YEAR = {2011},
MONTH = May, HAL_ID = {hal-00606922},
HAL_VERSION = {v1},
}