@inproceedings{desagazan:hal-00583980,
TITLE = {Realization of pressure Sensors using FET detection on a Thin Si Membrane},
AUTHOR = {de Sagazan, Olivier and Jacques, Emmanuel and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00583980},
NOTE = {WOS},
BOOK
TITLE = {24th Eurosensor Conference},
ADDRESS = {Linz, Austria},
PUBLISHER = {Elsevier},
VOLUME = {5},
PAGES = {637-640},
YEAR = {2010},
MONTH = Sep, DOI = {10.1016/j.proeng.2010.09.190},
HAL_ID = {hal-00583980},
HAL_VERSION = {v1},
}