@inproceedings{lu:hal-00567669,
TITLE = {Propri{\'e}t{\'e}s di{\'e}lectriques basse et haute fr{\'e}quence de couches minces p{\'e}rovskites oxynitrures LaTiOxNy d{\'e}pos{\'e}es sur diff{\'e}rents substrats},
AUTHOR = {Lu, Yu and Ziani, Ahmed and Fasquelle, Didier and Kassem, Hussein and Le Paven-Thivet, Claire and Le Gendre, Laurent and Benzerga, Ratiba and Tessier, Franck and Vigneras, Valerie and Carru, Jean-Claude and Sharaiha, Ala},
URL = {https://hal.science/hal-00567669},
BOOK
TITLE = {Journ{\'e}es Caract{\'e}risation Microondes Mat{\'e}riaux JCMM},
ADDRESS = {Brest, France},
YEAR = {2010},
MONTH = Mar, HAL_ID = {hal-00567669},
HAL_VERSION = {v1},
}