@inproceedings{lepaventhivet:hal-00567554,
TITLE = {Reactive sputtering deposition of perovskite LaTiO_xN_y films using a stoichiometric oxynitride LaTiO₂N target},
AUTHOR = {Le Paven-Thivet, Claire and Benzerga, Ratiba and Lu, Yu and Ziani, Ahmed and Le Gendre, Laurent and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala},
URL = {https://hal.science/hal-00567554},
BOOK
TITLE = {9th International Conference on Reactive Sputtering Deposition 2010},
ADDRESS = {Ghent, Belgium},
YEAR = {2010},
MONTH = Dec, HAL_ID = {hal-00567554},
HAL_VERSION = {v1},
}