@inproceedings{corredores:hal-00540610,
TITLE = {Laser micro-etching of ferroelectric layers for insertion loss reduction of tunable resonators},
AUTHOR = {Corredores, Yonathan and Simon, Quentin and Zhang, Lingyan and Benzerga, Ratiba and Castel, Xavier and Sauleau, Ronan and D{\'e}putier, St{\'e}phanie and Laurent, Paul and Tann{\'e},
G{\'e}rard and Guilloux-Viry, Maryline and Mahdjoubi, Kouroch},
URL = {https://hal.science/hal-00540610},
BOOK
TITLE = {JNTE 10 ''Journ{\'e}es Nationales sur les Technologies Emergentes en micro-nanofabication''},
ADDRESS = {Ecole Polytechnique, PALAISEAU, France},
PAGES = {We-E8},
YEAR = {2010},
MONTH = Nov, HAL_ID = {hal-00540610},
HAL_VERSION = {v1},
}