@inproceedings{cordier:hal-00540445,
TITLE = {Evaluation of SiN films for AlGaN/GaN MIS-HEMTs on Si(111)},
AUTHOR = {Cordier, Yvon and Le Cotonnec, Aude and Chenot, S{\'e}bastien and Baron, Nicolas and Farih, Nacer and Besland, Marie-Paule and Goullet, Antoine and El Kazzi, Mario and Regreny, Philippe and Hollinger, Guy and Lhermite, Herv{\'e},
URL = {https://hal.science/hal-00540445},
BOOK
TITLE = {International Workshop on Nitride Semiconductors},
ADDRESS = {Montreux, Switzerland},
YEAR = {2008},
MONTH = Oct, HAL_ID = {hal-00540445},
HAL_VERSION = {v1},
}