@inproceedings{demami:hal-00537567,
TITLE = {Synthesis, processing and characterization of silicon nanowires for (micro)sensor applications},
AUTHOR = {Demami, Fouad and Ni, Liang and Sala{\"u}n, Anne-Claire and Rogel, R{\'e}gis and Pichon, Laurent},
URL = {https://hal.science/hal-00537567},
BOOK
TITLE = {Rencontres Rennes-Senda{\"i}},
ADDRESS = {Senda{\"i},
Japan},
YEAR = {2009},
MONTH = Nov, HAL_ID = {hal-00537567},
HAL_VERSION = {v1},
}