@inproceedings{demami:hal-00537372,
TITLE = {Synth{\`e}se et caract{\'e}risation {\'e}lectrique de nanofils de silicium},
AUTHOR = {Demami, Fouad and Rogel, R{\'e}gis and Pichon, Laurent},
URL = {https://hal.science/hal-00537372},
BOOK
TITLE = {Journ{\'e}es Nationales du R{\'e}seau Doctoral de Micro{\'e}lectronique},
ADDRESS = {Lyon, France},
YEAR = {2009},
MONTH = May, HAL_ID = {hal-00537372},
HAL_VERSION = {v1},
}