@inproceedings{pichon:hal-00525426,
TITLE = {Fabrication et caract{\'e}risation de micro-dispositifs {\`a} base de silicium : applications aux microsyst{\`e}mes int{\'e}gr{\'e}s en technologie de surface},
AUTHOR = {Pichon, Laurent},
URL = {https://hal.science/hal-00525426},
BOOK
TITLE = {2{\`e}mes Rencontres Scientifiques Rennes-S{\'e}tif-Strasbourg},
ADDRESS = {S{\'e}tif, Algeria},
PAGES = {http://www.univ-setif.dz/RSS2/RSS2009/presentation.html},
YEAR = {2009},
MONTH = Oct, HAL_ID = {hal-00525426},
HAL_VERSION = {v1},
}