@article{demami:hal-00518386,
TITLE = {Fabrication of polycrystalline silicon nanowires using conventional UV lithography},
AUTHOR = {Demami, Fouad and Pichon, Laurent and Rogel, R{\'e}gis and Sala{\"u}n, Anne-Claire},
URL = {https://hal.science/hal-00518386},
JOURNAL = {Materials Science and Engineering},
PUBLISHER = {Elsevier},
VOLUME = {6},
NUMBER = {1},
PAGES = {ID 012014},
YEAR = {2009},
MONTH = Jun, DOI = {10.1088/1757-899X/6/1/012014},
HAL_ID = {hal-00518386},
HAL_VERSION = {v1},
}