@inproceedings{pichon:hal-00511871,
TITLE = {Travaux Pratiques de nano-technologies : caract{\'e}risation et r{\'e}alisation de nanoobjets par microscopie AFM en technologie silicium},
AUTHOR = {Pichon, Laurent and Lhermite, Herv{\'e} and Demami, Fouad},
URL = {https://hal.science/hal-00511871},
BOOK
TITLE = {8{\`e}me Colloque CETSIS},
ADDRESS = {Grenoble, France},
VOLUME = {papier en ligne n{\textdegree}49, et poster},
YEAR = {2010},
MONTH = Mar, HAL_ID = {hal-00511871},
HAL_VERSION = {v1},
}