@inproceedings{simon:hal-00511809,
TITLE = {Effect of adding argon in silane-hydrogen mixture during the deposition of doped and doped $\mu$c-SI and $\mu$c-SIGe films : Crystalline content and TFT performance},
AUTHOR = {Simon, Claude and Coulon, Nathalie . and Kandoussi, Khalid and Cherfi, Rabah and Fedala, Abdelkrim and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00511809},
BOOK
TITLE = {International Thin Film Transistor Conference, ITC'10},
ADDRESS = {Himeji, Japan},
PAGES = {92-95},
YEAR = {2010},
MONTH = Jan, HAL_ID = {hal-00511809},
HAL_VERSION = {v1},
}