@article{fedala:hal-00506597,
TITLE = {Low temperature deposition of microcrystalline silicon germanium Si1-xGex by RF-PECVD},
AUTHOR = {Fedala, Abdelkrim and Simon, Claude and Coulon, Nathalie . and Mohammed-Brahim, Tayeb and Abdeslam, M. and Chami, A.},
URL = {https://hal.science/hal-00506597},
NOTE = {WOS},
JOURNAL = {physica status solidi (c)},
PUBLISHER = {Wiley},
VOLUME = {7},
NUMBER = {3-4},
PAGES = {762-765},
YEAR = {2010},
DOI = {10.1002/pssc.200982791},
HAL_ID = {hal-00506597},
HAL_VERSION = {v1},
}