@inproceedings{ni:hal-00486457,
TITLE = {Microdispositifs pour applications capteurs},
AUTHOR = {Ni, Liang and Rogel, R{\'e}gis and Sala{\"u}n, Anne-Claire and Pichon, Laurent},
URL = {https://hal.science/hal-00486457},
BOOK
TITLE = {JNRDM},
ADDRESS = {Lyon, France},
YEAR = {2009},
MONTH = May, HAL_ID = {hal-00486457},
HAL_VERSION = {v1},
}