@inproceedings{castel:hal-00465068,
TITLE = {Multicouches {\`a} base d'ITO : synth{\`e}se et applications...},
AUTHOR = {Castel, Xavier},
URL = {https://hal.science/hal-00465068},
BOOK
TITLE = {Journ{\'e}e scientifique ''Clusters \& Couches Minces'' des Sciences Chimiques de Rennes},
ADDRESS = {RENNES, France},
YEAR = {2010},
MONTH = Mar, HAL_ID = {hal-00465068},
HAL_VERSION = {v1},
}