@inproceedings{toure:hal-00445739,
TITLE = {Optimization of a thin film technology process for quasi-vertical TFTs},
AUTHOR = {Tour{\'e},
Himi-Deen and Gaillard, Thierry and Coulon, Nathalie . and Bonnaud, Olivier and Rogel, R{\'e}gis},
URL = {https://hal.science/hal-00445739},
BOOK
TITLE = {E-MRS'2009},
ADDRESS = {Strasbourg, France},
YEAR = {2009},
MONTH = Jun, HAL_ID = {hal-00445739},
HAL_VERSION = {v1},
}