@inproceedings{demami:hal-00439490,
TITLE = {Synth{\`e}se du silicium nanostructur{\'e} pour dispositfs {\'e}lectroniques},
AUTHOR = {Demami, Fouad and Rogel, R{\'e}gis and Pichon, Laurent},
URL = {https://hal.science/hal-00439490},
BOOK
TITLE = {Journ{\'e}es Nationales du R{\'e}seau Doctoral de Micro{\'e}lectronique},
ADDRESS = {France},
PAGES = {Poster},
YEAR = {2008},
MONTH = May, HAL_ID = {hal-00439490},
HAL_VERSION = {v1},
}