@inproceedings{demami:hal-00439489,
TITLE = {Synth{\`e}se de silicium nanostructur{\'e} pour dispositifs {\'e}lectroniques},
AUTHOR = {Demami, Fouad and Rogel, R{\'e}gis and Pichon, Laurent},
URL = {https://hal.science/hal-00439489},
BOOK
TITLE = {Journ{\'e}es Nationales sur les Technologies Emergentes en micro-nano fabrication (JNTE)},
ADDRESS = {Toulouse, France},
YEAR = {2008},
MONTH = Nov, HAL_ID = {hal-00439489},
HAL_VERSION = {v1},
}