@inproceedings{belarbi:hal-00439478,
TITLE = {Nitrure de silicium et silicium microcristallin d{\'e}pos{\'e}s par PECVD pour les transistors basse temp{\'e}rature sur substrat souple},
AUTHOR = {Belarbi, Khaled and Coulon, Nathalie . and Simon, Claude and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00439478},
BOOK
TITLE = {Journ{\'e}es Nationales du R{\'e}seau Doctoral de Micro{\'e}lectronique},
ADDRESS = {Bordeaux, France},
YEAR = {2008},
MONTH = May, HAL_ID = {hal-00439478},
HAL_VERSION = {v1},
}