@inproceedings{belarbi:hal-00438630,
TITLE = {Transistor au silicium microcristallin fabriqu{\'e} {\`a} tr{\`e}s basse temp{\'e}rature (<200{\textdegree}C)},
AUTHOR = {Belarbi, Khaled and Coulon, Nathalie . and Simon, Claude},
URL = {https://hal.science/hal-00438630},
BOOK
TITLE = {Journ{\'e}es Nationales du R{\'e}seau Doctoral Micro{\'e}lectronique},
ADDRESS = {Lille, France},
YEAR = {2007},
MONTH = May, HAL_ID = {hal-00438630},
HAL_VERSION = {v1},
}