@inproceedings{kandoussi:hal-00438454,
TITLE = {Nanocrystalline silicon TFT process using silane diluted in argon-hydrogen mixtures},
AUTHOR = {Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Belarbi, Khaled and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00438454},
BOOK
TITLE = {22nd International Conference on Amorphous and Nanocrystalline Semiconductors},
ADDRESS = {Breckenridge, United States},
YEAR = {2007},
MONTH = Aug, HAL_ID = {hal-00438454},
HAL_VERSION = {v1},
}