@inproceedings{benabdelmoumen:hal-00438332,
TITLE = {Effet of the substrate holder bias voltage on the a-Si :H properties deposited by DC magnetron sputtering},
AUTHOR = {Benabdelmoumen, A. and Cherfi, Rabah and Tata, A. and Kechouane, M. and Aoucher, M. and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00438332},
BOOK
TITLE = {22nd International Conference on Amorphous and Nanocrystalline Semiconductors},
ADDRESS = {Breckenridge, United States},
YEAR = {2007},
MONTH = Aug, HAL_ID = {hal-00438332},
HAL_VERSION = {v1},
}