@inproceedings{kandoussi:hal-00437528,
TITLE = {Effet de l'addition d'argon sur les propri{\'e}t{\'e}s structurales des films de silicium microcristallin d{\'e}pos{\'e}s par PECVD {\`a} basse temp{\'e}rature},
AUTHOR = {Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Pier, Tanguy and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00437528},
BOOK
TITLE = {Journ{\'e}es Nationales du R{\'e}seau Doctoral de Micro{\'e}lectronique},
ADDRESS = {Rennes, France},
PAGES = {Poster},
YEAR = {2006},
MONTH = May, HAL_ID = {hal-00437528},
HAL_VERSION = {v1},
}