@inproceedings{kandoussi:hal-00437498,
TITLE = {Effect of argon dilution on the microstructral properties of PECVD microcrystalline silicon film and related TFT's performance},
AUTHOR = {Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Pier, Tanguy and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00437498},
BOOK
TITLE = {Spring Meeting EMRS},
ADDRESS = {Nice, France},
YEAR = {2006},
MONTH = May, HAL_ID = {hal-00437498},
HAL_VERSION = {v1},
}