@article{zaghdoudi:hal-00437327,
TITLE = {Phosphorus doping and deposition pressure effects on optical and electrical properties of polysilicon},
AUTHOR = {Zaghdoudi, Mariem and Abdelkrim, M. and Fathallah, M. and Mohammed-Brahim, Tayeb and Rogel, R{\'e}gis},
URL = {https://hal.science/hal-00437327},
JOURNAL = {Materials Science and Engineering: C},
PUBLISHER = {Elsevier},
VOLUME = {26},
NUMBER = {2-3},
PAGES = {177-180},
YEAR = {2006},
MONTH = Mar, HAL_ID = {hal-00437327},
HAL_VERSION = {v1},
}