@article{kandoussi:hal-00437313,
TITLE = {Undoped and arsenic doped low temperature (165{\textdegree}C) microcrystalline silicon for electronic device process},
AUTHOR = {Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Mohammed-Brahim, Tayeb and Mor{\'e}ac, Alain},
URL = {https://hal.science/hal-00437313},
JOURNAL = {Journal of Non-Crystalline Solids},
PUBLISHER = {Elsevier},
VOLUME = {352},
NUMBER = {9-20},
PAGES = {968-971},
YEAR = {2006},
MONTH = Jun, HAL_ID = {hal-00437313},
HAL_VERSION = {v1},
}