@article{fedala:hal-00437287,
TITLE = {Structural, optical and electrical properties of hydrogenated amorphous silicon germanium (a-Si1-xGex) deposited by DC magnetron sputtering at high rate},
AUTHOR = {Fedala, Abdelkrim and Cherfi, Rabah and Aoucher, M. and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00437287},
JOURNAL = {Materials Science in Semiconductor Processing},
PUBLISHER = {Elsevier},
VOLUME = {9},
NUMBER = {4-5},
PAGES = {690-693},
YEAR = {2006},
MONTH = Aug, HAL_ID = {hal-00437287},
HAL_VERSION = {v1},
}