@inproceedings{legeay:hal-00403019,
TITLE = {Excimer Laser beam / ITO thin films interaction: from surface reaction to laser processing},
AUTHOR = {Legeay, G{\'e}rard and Castel, Xavier and Benzerga, Ratiba and Pinel, Jacques},
URL = {https://hal.science/hal-00403019},
BOOK
TITLE = {LPSD 2007 ''Laser Processing for Semiconductor Device: Science and Technology''},
ADDRESS = {Saint-Malo, France},
YEAR = {2007},
MONTH = Oct, HAL_ID = {hal-00403019},
HAL_VERSION = {v1},
}